SF6
Semiconductor Etching Gas
SF6 is a new generation of ultra-high voltage insulating dielectric material. It can be used in smelting and casting processes for non-ferrous metals, also for degassing and purification of molten aluminium and its alloys. It can be used for arc extinguishing in high voltage switches and as an insulating material in high capacity transformers and high voltage cables. It can be used as a gas insulator for electronic equipment and radar waveguides.
Special Features:
Ultra High Purity Tailored To Your Requirements
Excellent Etching Rate & Selectivity
Product Availability
Sample | Available |
Commercial | Available |
ISO Tank | Available |
Custom Packaging | Upon Request |
Product Description
Chemical Name | Sulfur Hexafluoride |
Synonyms | SF6 |
CAS # | 2551-62-4 |
ELINCS # (EU) | 219-854-2 |
Molecular Formula | SF6 |
Molecular Weight | 146.05 |
Physical state | Gas |
Color | Colorless |
Odor | Odorless |
Product Properties
Chemical Name | Sulfur Hexafluoride |
Boiling Point(℃) | -50 |
Melting Point（℃） | -64 |
Liquid Density（Water=1） | 1.67 |
Gas Density (Air=1) | 6.602 |
Vapor Pressure（kPa, @25℃） | 2450 |
Critical Temperature（℃） | 45.6 |
Critical Pressure（kPa） | 3.76 |
Solubility（@20℃） | slightly |
Flash Point（℃） | Not applicable |
Flammability（@21℃） | Not applicable |
Explosion Limit（%vol) | Not applicable |